Optical waveguide modulator equipped with an output light monitor

ABSTRACT

An optical waveguide element having a plurality of surface waveguide portions. A connecting portion for connecting the surface waveguide portions. An output light-outputting waveguide portion connected to the connecting portion each on a dielectric substrate. An output light optical fiber connected to an output end of the output light-outputting waveguide portion. A reinforcing capillary for a connection between the optical waveguide element and the output light optical fiber and a monitoring light receiver. The reinforcing capillary has a hole or groove for supporting the output light optical fiber, a connecting face bonded to an output end face of the substrate, and a terminal surface opposite to the connecting face. The light outputted from the optical waveguide element, therethrough to the outside of the capillary.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional of U.S. Application No. 09/980,606,filed Nov. 15, 2001 now U.S. Pat. No. 7,200,289, which is a NationalPhase Patent Application of International Application NumberPCT/JP01/02073, filed on Mar. 15, 2001, which claims priority to JapanPatent Application No. 2000-101316, filed Mar. 31, 2000 and Japan PatentApplication No. 2000-380629, filed Dec. 14, 2000, the entire disclosuresof which are incorporated herein by reference.

TECHNICAL FIELD

The present invention relates to an optical waveguide modulator equippedwith an output light monitor. More particularly, the present inventionrelate to an optical waveguide modulator, equipped with an output lightmonitor, usable for modulating an external light intensity in theoptical communication field, and capable of monitoring output light byutilizing monitoring light radiated or outputted from an opticalwaveguide, and controlling the working point in the modulation of lightintensity by feeding-back the monitoring results.

BACKGROUND ART

An optical waveguide modulator, in which an optical waveguide is formedon a substrate plate comprising LiNbO₃ (which may be referred to as LNhereinafter) or GaAs, is advantageous in that the working velocity ishigh, the dependency on wavelength is low and the driving voltage islow, and thus it is widely used for practical external modulators in theoptical communication field. Particularly, an optical waveguidemodulator is widely used in DWDM system in which the lowwavelength-dependency thereof is advantageously utilized.

However, in the optical waveguide modulator, a drift in the workingpoint voltage, which is referred to as a temperature drift or a DCdrift, occurs. Due to this phenomenon, it becomes necessary that outputlight from the modulator is monitored and the monitored output is fedback to the working point voltage to maintain the working point in aparticular one point on a particular characteristic curve even when thedrift phenomenon occurs.

As a means for monitoring the output light of the modulator, amonitoring system in which an optical fiber for output light isconnected to an optical coupler located outside of the modulator module,the outputted light is divided into a main signal light and a branchlight for monitoring at the optical coupler, the monitoring branch lightis converted to electric signal by a photoelectric conversion element,and DC voltage of the modulator is controlled in accordance with theelectric signal, is known. In this system, however, there is the problemthat since the optical coupler for providing the monitoring branchedlight and the photoelectric conversion elements must be arrange outsideof the modulator module, the cost of the modulator system increases,limitations on the dimension and form of the system increase and thereliability of the system decreases.

As another means for monitoring the output light from the opticalwaveguide element, a system in which a coupler, particularly adirectional coupler is arranged in the optical waveguide element and anoutput light waveguide portion for the monitoring light is provided inaddition to a optical signal-outputting waveguide portion, is usually,utilized. In this system, an optical circuit for the branched monitoringlight must be arranged in the optical waveguide element and an opticalfiber for the monitoring output light, in addition to the optical fiberfor the output light for signal, must be connected to the opticalwaveguide element.

As still another monitoring system, a system in which, as disclosed inJapanese Unexamined Patent Publication No. 11-194,237, an inclined holeis formed in a cladding portion on an optical waveguide, or adiffraction lens is arranged above an optical waveguide element, and aportion of output signal light in the optical waveguide is taken to theoutside of the substrate plate of the element by the above-mentionedhole or lense, is known. In this system, installation of a lens etc. fortaking the monitoring light out of the optical waveguide element isnecessary and, as the monitoring light is taken out of the opticalwaveguide element, a member for receiving the monitoring light must beinstalled on the optical waveguide element after the element is fixed ina container case, and this installation is difficult and complicated.

Further, Japanese Unexamined Patent Publication No. 5-34,650 discloses asystem in which an end of an optical waveguide element is formed into aninclined form, a portion of output light from the waveguide is reflectedon the end of the element in an inclined direction, and the reflectedlight is received as a monitoring light. In this system, the inclinedend form of the element must be determined to an extent such that theinclined end does not affect the main output light from the element, andthus there is a problem in practical utilizability of this system.

Japanese Unexamined Patent Publication No. 5-53086 discloses an opticaldevice in which a light-receiving element is directly arranged on anoptical waveguide element so that a portion of the output signal lightfrom the optical waveguide can be directly received and monitored by thelight receiving element. In this device, a means for fixing thelight-receiving element must be installed on the optical waveguideelement and since the fixing means-installation work, a work forconnecting the fixing means to the light-receiving element and anoperation for adjusting the connected light-receiving element areeffected after the optical waveguide element is fixed to a containercase, the above-mentioned works and operation are very difficult and thepossibility of damaging the optical waveguide element by theabove-mentioned works and operation is high.

DISCLOSURE OF THE INVENTION

An object of the present invention is to provide an optical waveguidemodulator having an output light monitor to which the limitations indimension and form are small and which is capable of monitoring theintensity of output light from the modulator by a monitoring meanshaving a simple constitution with high reliability and with at low cost.

The above-mentioned object can be attained by the optical waveguidemodulator equipped with an output light monitor of the presentinvention.

The optical waveguide modulator equipped with an output light monitor ofthe present invention comprises:

-   -   an optical waveguide element comprising a dielectric substrate        and an optical waveguide formed on a front surface of the        dielectric substrate, the optical waveguide comprising a        plurality of surface optical waveguide portions, an optical        waveguide connecting portion on which the surface optical        waveguide portions are converged and connected to each other and        an output light-outputting optical waveguide portion connected        to the optical waveguide-connecting portion;    -   an optical fiber for output light, connected to an output end of        the output light-outputting optical waveguide portion of the        optical waveguide element;    -   a reinforcing capillary for reinforcing a connection between the        optical waveguide element and the output light-outputting        optical fiber; and    -   a means for receiving monitoring light,    -   wherein    -   the reinforcing capillary is provided with a hole or groove        formed therein for containing and holding the optical fiber for        output light, a connection surface thereof connected to an        output end side surface of the substrate of the optical        waveguide element, and a terminal surface thereof opposite to        the connection surface, to thereby enable the reinforcing        capillary to receive the monitoring light outputted from the        optical waveguide element through at least one member selected        from the capillary itself and the optical fiber for the        monitoring light located in the capillary, to transmit the        monitoring light therethrough and to output the monitoring light        to the outside of the capillary; and    -   the monitoring light-receiving means is located in a position in        which the monitoring light outputted from the reinforcing        capillary to the outside of the capillary can be received, and        is provided with a photoelectric conversion element.

In an embodiment (1) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, the reinforcing capillaryis formed from a light-transmitting material, to thereby enableradiation mode light generated in the optical waveguide connectingportion of the optical waveguide element to transmit through thedielectric substrate and to be received by the light-transmittingreinforcing capillary, and the radiation mode light outputted from thereinforcing capillary to be received, as monitoring light, by themonitoring light-receiving means.

In the embodiment (1) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, thelight-transmittable material for the reinforcing capillary is selectedfrom transparent glasses.

In the embodiment (1) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, theterminal surface of the reinforcing capillary formed from alight-transmittable material is a light-reflective surface, to therebyenable radiation mode light radiated from the optical waveguideconnecting portion of the optical waveguide element to pass through thedielectric substrate of the optical waveguide element and thereinforcing capillary connected to the output end surface of thedielectric substrate, and to be reflected on the terminallight-reflective surface, and the reflected radiation mode light to bereceived, as a monitoring light, by the monitoring light-receivingmeans.

In an embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, thereinforcing capillary is in the form of a cylinder.

In the embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, thereinforcing capillary is a transparent glass cylinder; the hole orgroove for holding the optical fiber for the output light is preferablyformed along the longitudinal axis of the transparent glass cylindricalcapillary; and the longitudinal axis of the hole or groove preferablyintersects the light-reflective terminal surface at an oblique angle.

In the embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, theradiation mode light reflected on the reflective terminal surface of thecylindrical reinforcing capillary is transmitted toward a periphery ofthe capillary and then is outputted, as a monitoring light through theperiphery of the capillary, the outputted monitoring light is convergedby a lens effect of the periphery of the cylindrical reinforcingcapillary, and the converged monitoring light is received by themonitoring light-receiving means.

In the embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, alight-reflective membrane is formed on the terminal surface of thereinforcing capillary.

In the embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, theterminal surface of the reinforcing capillary is formed into a curvedsurface projecting outward to thereby enable the monitoring light passedthrough the reinforcing capillary to be reflected and converged on thecurved terminal surface, and then to be received by the monitoringlight-receiving means.

In the embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, theconnection surface of the reinforcing capillary is bonded to the opticalwaveguide element through an adhesive agent, and a firststain-preventing groove is formed on a portion of the bottom surface ofthe reinforcing capillary and close to the connection surface of thereinforcing capillary to thereby receive an excessive portion of theadhesive agent applied between the connection surfaces of thereinforcing capillary and the optical waveguide element and to preventstaining of the periphery of the reinforcing capillary through which theradiation mode light is outputted.

In an embodiment (1)-(a) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, theoptical fiber for the output light is bonded to the hole or groove ofthe reinforcing capillary through an adhesive agent, and

-   -   a second stain-preventing groove is formed on a portion of the        bottom surface of the reinforcing capillary and close to the        light reflecting terminal surface of the reinforcing capillary,        to thereby receive an excessive portion of the adhesive agent        applied between the optical fiber and the hole or groove of the        reinforcing capillary and to prevent staining of the periphery        of the reinforcing capillary through which the radiation mode        light is outputted.

In an embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, theterminal surface of the reinforcing capillary formed from thelight-transmitting material is provided with a surface portion in whichthe monitoring light is reflected and a non-monitoring surface portion,whereby when the radiation mode light radiated from the opticalwaveguide connection portion of the optical waveguide element throughboth side portions of the output light-outputting optical waveguideportion passes through the dielectric substrate of the optical waveguideelement and the reinforcing capillary connected to the output endsurface of the dielectric substrate, only a portion of the radiationmode light radiated to one side portion of the output light-outputtingoptical waveguide portion is reflected on the monitoringlight-reflecting surface portion of the reinforcing capillary toward themonitoring light-receiving means, received as a monitoring output lightby the monitoring light-receiving means, and another portion of theradiation mode light that reaches the non-monitoring surface portion isnot received as a monitoring light by the monitoring light-receivingmeans.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, thereinforcing capillary is in the form of a cylinder.

The optical waveguide modulator equipped with an output light monitor asclaimed in claim 12, wherein the terminal reflecting surface portion ofthe reinforcing capillary intersects the direction of the longitudinalaxis of the hole or groove in which the output light-outputting opticalfiber is received, at an oblique angle, to thereby enable the radiationmode light reflected on the terminal reflecting surface portion to bereceived, as monitoring light, by the monitoring light-receiving means.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, theportion of the radiation mode light reflected on the reflecting surfaceportion of the cylindrical reinforcing capillary is outputted, asmonitoring light, through the periphery of the cylindrical reinforcingcapillary, and converged by the lens effect of the periphery of thecylindrical reinforcing capillary, and the converged monitoring light isreceived by the monitoring light-receiving means.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, alight-reflective membrane is formed on the terminal light-reflectingsurface portion of the reinforcing capillary.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, aportion of the terminal surface of the reinforcing capillary is formedinto a curved surface projecting outward, to thereby enable themonitoring light transmitted through the reinforcing capillary to bereflected on the curved surface portion of the terminal surface andconverged, and to be received by the monitoring light-receiving means.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, inthe terminal surface of the reinforcing capillary, a boundary linebetween the light-reflecting surface portion and the non-monitoringsurface portion is located between a transmitting path of a portion ofthe radiation mode light which reaches the light-reflecting surfaceportion and another transmitting path of another portion of theradiation mode light which reaches the non-monitoring surface portion;and the boundary line is positioned between a center line of theterminal surface of the reinforcing capillary intersecting thelongitudinal axis of the hole and extending in the same direction asthat of the boundary line, and a tangential line extending in parallelto the center line and coming into contact with a portion of a peripheryline of the hole of the reinforcing capillary from which portion of theperiphery line, the light-reflecting surface portion is formed.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, thenon-monitoring surface portion of the terminal surface of thereinforcing capillary is one formed in a manner such that a portion ofthe reinforcing capillary is cut off inward from the terminal surface ofthe capillary, while another portion of the reinforcing capillary havingthe light-reflecting surface portion of the terminal surface thereof isnot cut off.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably, thenon-monitoring surface portion of the terminal surface of thereinforcing capillary is a non-light reflecting surface not capable ofreflecting the radiation mode light.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, and preferablywith respect to the non-monitoring surface portion of the terminalsurface of the reinforcing capillary, a means for intercepting theradiation mode light reflected on the non-monitoring surface portion isarranged between the non-monitoring surface portion and the monitoringlight-receiving means.

In the embodiment (1)-(b) of the optical waveguide modulator equippedwith an output light monitor of the present invention, preferably withrespect to the non-monitoring surface portion of the terminal surface ofthe reinforcing capillary, a means for intercepting the radiation modelight is provided in the reinforcing capillary and upstream of thenon-monitoring surface portion.

In an embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, preferably, the opticalwaveguide of the optical waveguide element has a monitoringlight-outputting optical waveguide portion connected to thewaveguide-connecting portion, in addition to the output light-outputtingoptical waveguide portion, to thereby output the monitoring lightthrough the output end of the monitoring light-outputting opticalwaveguide portion.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably an end faceof an optical fiber piece for outputting the monitoring light isconnected to the outputting end of the monitoring light-outputtingwaveguide portion;

-   -   the optical fiber piece for outputting the monitoring light is        held in a groove for the monitoring light, which groove is        formed in the reinforcing capillary and is longer than the        optical fiber piece for outputting the monitoring light; an end        face of the groove for the monitoring light, facing the output        end face of the optical fiber piece for outputting the        monitoring light constitutes a reflecting surface for the        monitoring light, whereby the monitoring light outputted through        the output end of optical fiber piece for outputting the        monitoring light is reflected on the above-mentioned reflecting        surface, and the reflected monitoring light is received, as an        outputted monitoring light, by the monitoring light-receiving        means.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, thereflecting end face of the groove for the monitoring light isconstituted by a light-reflecting membrane.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, theoptical fiber piece for the output monitoring light is formed from amulti-mode optical fiber.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, anX-coupler or a directional coupler is arranged in thewaveguide-connecting portion of the optical waveguide element, and theoutput light-outputting optical waveguide portion and the monitoringlight-outputting optical waveguide portion are connected to theX-coupler or the directional coupler.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, the outputlight-outputting optical waveguide portion of the optical waveguideelement is connected to the waveguide-connecting portion, and themonitoring light-outputting optical waveguide portion is connected tothe output light-outputting optical waveguide portion through thedirectional coupler.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, an endface of the monitoring light-outputting optical fiber piece is connectedto an output end of the monitoring light-outputting optical waveguideportion;

-   -   the monitoring light-outputting optical fiber piece is held in a        hole or groove formed in the reinforcing capillary and is not        longer than the monitoring light-outputting optical fiber;    -   the hole or groove for the monitoring light formed in the        reinforcing capillary inclines in a manner such that the farther        the hole or groove for the monitoring light from the connection        surface between the reinforcing capillary and the optical        waveguide element, the farther the hole or groove for the        monitoring light from the hole or groove for the output light;        and    -   the output end face of the monitoring light-outputting optical        fiber piece is directed to the monitoring light-receiving means,        whereby the monitoring light outputted from the output end face        of the monitoring light-outputting optical fiber piece is        received by the monitoring light-receiving means.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably themonitoring light-outputting optical fiber piece is formed from amulti-mode optical fiber.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably anX-coupler or a directional coupler is arranged in thewaveguide-connecting portion of the optical waveguide element, and theoutput light-outputting optical waveguide portion and the monitoringlight-outputting optical waveguide portion are connected to theX-coupler or the directional coupler.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably the outputlight-outputting optical waveguide portion of the optical waveguideelement is connected to the waveguide-connecting portion, and themonitoring light-outputting optical waveguide portion is connected tothe output light-outputting optical waveguide portion through thedirectional coupler.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably themonitoring light-outputting optical waveguide portion of the opticalwaveguide element is connected, together with the outputlight-outputting optical waveguide portion, to the waveguide-connectionportion connected to the plurality of surface waveguide portions,through a directional coupler, a cross-coupler structure or a TAPcoupler structure;

-   -   the output end of the output light-outputting optical waveguide        portion is connected to an input end of an optical fiber        inserted into the hole or groove of the reinforcing capillary;    -   the reinforcing capillary is formed from a light-intermitting        material, to thereby enable the monitoring light outputted from        the output end of the monitoring light outputting waveguide        portion to pass and permeate through the reinforcing capillary,        to be reflected on the light-reflecting surface portion provided        in the reinforcing capillary, and to be received by the        monitoring light-receiving means; and    -   the output end of the output light-outputting optical waveguide        portion and the output end of the monitoring light-outputting        optical waveguide portion are spaced from each other through a        distance, the spacing distance being sufficiently large not to        cause the monitoring light outputted from the monitoring        light-outputting optical waveguide portion and intermitting        through the reinforcing capillary to be affected by the output        light outputted from the output end of the output        light-outputting optical waveguide portion.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, theterminal surface of the reinforcing capillary is provided with alight-reflecting surface portion which intersects an optical axis of themonitoring light-outputting optical waveguide portion at an obliqueangle, to thereby enable the monitoring light outputted from the outputend of the monitoring light-outputting optical waveguide portion andtransmitted through the reinforcing capillary to be reflected on thelight-reflecting surface portion toward the monitoring light-receivingmeans.

In an embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, preferably, the terminalsurface of the reinforcing capillary is provided with a curved surfaceportion projecting outward, to thereby enable the monitoring lighttransmitted through the reinforcing capillary to be reflected andconverged on the curved surface portion and to be received by themonitoring light-receiving means.

In an embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, preferably, at least aregion of the portion of the terminal surface of the reinforcingcapillary, which portion does not contribute to transmitting andoutputting the monitoring light directed to the monitoringlight-receiving means, is cut off.

In an embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, preferably, thelight-reflecting surface portion of the terminal surface of thereinforcing capillary intersects the longitudinal axis of the hole forcontaining therein the output light-outputting optical fiber at anoblique angle, to thereby enable the radiation mode light reflected onthe light reflecting surface portion is received, as monitoring light,by the monitoring light-receiving means.

In an embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, preferably, thereinforcing capillary is in the form of a cylinder.

In an embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, preferably, thelight-reflecting surface of the cylindrical reinforcing capillaryenables the radiation mode light reflected on the light-reflectingsurface to pass through the cylindrical reinforcing capillary and to beoutputted, as monitoring light, through the peripheral surface of thecylindrical reinforcing capillary, while the monitoring light isconverged by the lens effect of the periphery of the cylindricalreinforcing capillary, and the converged monitoring light to be receivedby the monitoring light-receiving means.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, in theterminal surface of the reinforcing capillary, a boundary line betweenthe light-reflecting surface portion and the non-monitoring surfaceportion is located between a transmitting path of a portion of theradiation mode light forwarding to the light-reflecting surface portionand another transmitting path of another portion of the radiation modelight forwarding to the non-monitoring surface portion, and the boundaryline is positioned between a center line of the terminal surface of thereinforcing capillary intersecting the longitudinal axis of the hole andextending in the same direction as that of the boundary line, and atangential line extending in parallel to the center line and coming intocontact with a portion of a periphery line of the hole of thereinforcing capillary from which portion of the periphery line, thelight-reflecting surface portion is formed.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, thenon-monitoring surface portion of the terminal surface of thereinforcing capillary is one formed in a manner such that a portion ofthe reinforcing capillary is cut off inward from the terminal surface ofthe capillary, while another portion of the reinforcing capillary havingthe light-reflecting surface portion of the terminal surface thereof isnot cut off.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, thenon-monitoring surface portion of the terminal surface of thereinforcing capillary is a non-light reflecting surface not capable ofreflecting the radiation mode light.

In the embodiment (2) of the optical waveguide modulator equipped withan output light monitor of the present invention, preferably, withrespect to the non-monitoring surface portion of the terminal surface ofthe reinforcing capillary, a means for intercepting the radiation modelight reflected on the non-monitoring surface portion is arrangedbetween the non-monitoring surface portion and the monitoringlight-receiving means.

In the optical waveguide modulator equipped with an output light monitorof the present invention, preferably, the optical waveguide element hasa SiO₂ layer formed on a portion of the optical waveguide other than aninput end portion of the surface optical waveguide portion and theoutput end portions of the output light-outputting optical waveguideportion and the monitoring light-outputting optical waveguide portion.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1(A) is a graph showing an applied voltage-light outputcharacteristic curve of a conventional modulator.

FIG. 1(B) shows a form of optical waves of an RF signal inputted intothe modulator having the characteristic properties as shown in FIG.1(A).

FIG. 1(C) shows a form of optical waves of an output signal outputtedfrom the modulator having the characteristic properties as shown in FIG.1(A).

FIG. 1(D) shows an irregular form of optical waves of a signal outputtedfrom the above-mentioned modulator.

FIG. 2 is an explanatory plan view showing a constitution of anembodiment of the conventional optical waveguide modulator equipped withan output light monitor.

FIG. 3 is an explanatory plan view showing a constitution of anotherembodiment of the conventional optical waveguide modulator equipped withan output light monitor.

FIG. 4(A) is an explanatory plan view showing a generation of radiationmode light in an optical waveguide element having a plurality of surfacewaveguide portions and a waveguide-connection portion at which thesurface waveguide portions are converged and connected to each other.

FIG. 4(B) is an explanatory side view showing a generation of theradiation mode light in the optical waveguide element shown in FIG.4(A).

FIG. 5 is an explanatory plan view showing a constitution of anembodiment of the optical waveguide modulator equipped with an outputlight monitor of the present invention.

FIG. 6 is an explanatory front view showing the constitution of theoptical waveguide modulator equipped with an output light monitor shownin FIG. 5.

FIG. 7 is an explanatory side view showing arrangements of a reinforcingcapillary and an optical fiber and conditions of output light andradiation mode light at an output end face of the optical waveguideelement of the modulator shown in FIGS. 5 and 6.

FIG. 8 is a graph showing embodiments of wave forms of the signal lightand the monitoring light outputted from the modulator shown in FIGS. 5and 6.

FIG. 9 is an explanatory view showing a light-incident surface region ofa photoelectric conversion element of the monitoring light-receivingmeans, to which region, the radiation mode light (monitoring light)reflected in the modulator shown in FIGS. 5 and 6 is inputted.

FIG. 10 is an explanatory plan view showing a constitution of animportant portion of the optical waveguide modulator equipped with anoutput light monitor of the present invention.

FIG. 11 is an explanatory side view showing an example of the form of aradiation mode light-reflection surface formed at a terminal of areinforcing capillary of the optical modulator shown in FIG. 5.

FIG. 12 is an explanatory plan view showing a constitution of anotherembodiment of the optical waveguide modulator equipped with an outputlight monitor of the present invention.

FIG. 13 is an explanatory side view showing a constitution of animportant portion of still another embodiment of the optical waveguidemodulator equipped with an output light monitor of the presentinvention.

FIG. 14 is an explanatory plan view showing a constitution of animportant portion of further another embodiment of the optical waveguidemodulator equipped with an output light monitor of the presentinvention.

FIG. 15 is an explanatory partially cross-sectional front view showing aconstitution of an important portion of the optical modulator of FIG.14.

FIG. 16 is a graph showing wave forms of main output light andmonitoring output light outputted from the optical modulator shown inFIGS. 14 and 15.

FIG. 17 is an explanatory cross-sectional view of the reinforcingcapillary of the optical modulator of FIGS. 14 and 15.

FIG. 18(A) is an explanatory plan view showing an example of the form ofa monitoring V-shaped groove of the reinforcing capillary of the opticalwaveguide modulator equipped with an output light monitor of the presentinvention.

FIG. 18(B) is an explanatory cross-sectional front view of themonitoring V-shaped groove of FIG. 18(A).

FIG. 18(C) is an explanatory cross-sectional side view of the monitoringV-shaped groove of FIG. 18(A).

FIG. 19(A) is an explanatory plan view showing a constitution of anembodiment of the optical waveguide portion of the optical waveguideelement of the optical waveguide modulator equipped with an output lightmonitor of the present invention.

FIG. 19(B) is an explanatory plan view showing a constitution of anotherembodiment of the optical waveguide portion of the optical waveguideelement of the optical waveguide modulator equipped with an output lightmonitor of the present invention.

FIG. 20(A) is an explanatory plan view showing a constitution of anexample of optical waveguides which are practically unworkable.

FIG. 20(B) is an explanatory plan view showing a constitution of anotherexample of an optical waveguides which are practically unworkable.

FIG. 21 is an explanatory plan view showing a constitution of animportant portion of another embodiment of the optical waveguidemodulator equipped with an output light monitor of the presentinvention.

FIG. 22 is an explanatory plan view showing a constitution of animportant portion of still another embodiment of the optical waveguidemodulator equipped with an output light monitor of the presentinvention.

FIG. 23 is an explanatory plan view showing a constitution of animportant portion of further another embodiment of the optical waveguidemodulator equipped with an output light monitor of the presentinvention.

FIG. 24(A) is an explanatory plan view showing an example of theconnection system between an output light waveguide portion and amonitoring light waveguide portion in the connection portion of aplurality of surface waveguide portions with each other, in the opticalwaveguide element of the optical waveguide modulator equipped with anoutput light monitor of the present invention.

FIG. 24(B) is an explanatory plan view showing another example of theconnection system between an output light waveguide portion and amonitoring light waveguide portion in the connection portion of aplurality of surface waveguide portions with each other, in the opticalwaveguide element of the optical waveguide modulator equipped with anoutput light monitor of the present invention.

FIG. 24(C) is an explanatory plan view showing still another example ofthe connection system between an output light waveguide portion and amonitoring light waveguide portion in the connection portion of aplurality of surface waveguide portions with each other, in the opticalwaveguide element of the optical waveguide modulator equipped with anoutput light monitor of the present invention.

FIG. 25 is an explanatory side view of a terminal portion of anembodiment of the reinforcing capillary of the optical waveguidemodulator equipped with an output, light monitor of the presentinvention.

FIG. 26 is an explanatory schematic view showing a form of thereinforcing capillary of the optical waveguide modulator equipped withan output light monitor of the present invention.

FIG. 27 is an explanatory plan view of another embodiment of the opticalwaveguide modulator equipped with an output light monitor of the presentinvention, and

FIG. 28 is an explanatory front view of the optical waveguide modulatorequipped with an output light monitor shown in FIG. 27.

BEST MODE OF CARRYING OUT THE INVENTION

As mentioned above, in the optical waveguide modulator, usually a driftin working point voltage, which is referred to as a temperature driftand a DC drift, occurs and thus it is necessary that the working pointvoltage is controlled in response to the output of the modulator toretain the working point in the same one point on a particularcharacteristic curve even when the drift occurs. This necessity will beexplained below in referring to FIGS. 1(A) to 1(D). In the form of waves1 in the applied voltage-light output characteristic curve of amodulator, when a working point is located in a central point 2 of thewave form 1, and an RF signal 3 as shown in FIG. 1(B) is applied to themodulator through a light-inputting optical fiber 22, the resultantlight output has a form of waves 4 of signal shown in FIG. 1(C) whichform is analogous to that of the applied RF signal 3. In this case, whenthe form of waves of the characteristic curve is shifted to a form ofwaves 5 shown by dotted line in FIG. 1(A) due to a temperature driftand/or a DC drift, the resultant output waves take an irregular form 6as shown in FIG. 1(D).

However, even when the characteristic curve takes the wave form 5, theoutput wave form can be retained in the form of the wave 4 bycontrolling the applied DC voltage so that the working point is locatedin the central point 7 of the waves 5.

FIG. 2 shows a constitution of an embodiment of the conventional opticalwaveguide modulator equipped with an output light-feeding backcontrolling system. In FIG. 2, a modulator chip 9 of an opticalwaveguide modulator 8 is a substrate plate consisting of a LN or GaAscrystal, and on a surface portion of the substrate plate 9, aMach-Zehnder type (MZ type) waveguide 8 a comprising an input waveguideportion 10, an Y-shaped separation portion 11. MZ arm waveguide portions12, 13, a wave-combining device 14 and output waveguide portion 15, isformed. Control electrodes 16, 16′ are arranged close to the armwaveguide portions 12, 13. Between the electrodes 16 and 16′, a RFsignal voltage 18 is applied from a RF signal-oscillator(electrode-control circuit 18 a) through a connector 17, and in responseto the applied RF signal 18, the light transmitting through thewaveguide 8 a is phase-modulated and wave-combined in the wave-combiningdevice 14. The output light changed in intensity as mentioned above isoutputted from the output waveguide portion 15 through an optical fiber23 for output light.

Separately, a DC voltage 21 is applied between the electrodes 19 and 19′arranged respectively in series to the RF electrodes 16 and 16′ througha DC terminal 20, to establish the working point of the modulation curvein a center point 2 of the RF signal 18. The input and output waveguideportions 10 and 15 are respectively connected to the input and outputoptical fibers 22 and 23. The output optical fiber 23 is connected to anoptical coupler 25 located outside of the modulator modul 24. In theoptical coupler 25, the output light is divided into a main signal light25 a and a branch light 26. The main signal light 25 a is outputted fromthe optical coupler 25, and the branch light 26 is inputted to aphotoelectric conversion element 27 and converted to electric signal.The electric signal is inputted to a bias control circuit 28 andcontrols the DC voltage 21 in the circuit. By controlling the DC voltage21 as mentioned above, even which a DC drift occurs, it becomes possibleto identify the working point on the modulation curve and to preventstraining of the modulation curve.

However, in the conventional modulator as shown in FIG. 2, the opticalcoupler 25 and the photoelectric conversion element 27 are necessarilyarranged, and this necessity causes the cost of the modulator system toincrease, the limitation on the dimensions and form of the system to besevere and the reliability of the system to decrease.

FIG. 3 shows an explanatory plan view of another embodiment of theconventional optical waveguide modulator equipped with an output lightmonitor. Referring to FIG. 3, in an optical waveguide element 30 of amodulator 29, a Mach-Zehnder (MZ) type optical waveguide 32 andelectrodes 33 for controlling the optical waveguide 32 are arranged on adielectric substrate plate 31, and an output signal light 34 isoutputted from an output end of the optical waveguide 32 through anoptical fiber 23. In the element 30, an optical waveguide portion 37 formonitoring light is connected to a portion of the waveguide 32 locateddownstream from a connection portion 35 through a directional connector36, and a portion of the light outputted through the connection portion35 is separated from the outputted light and utilized as monitoringlight. The optical waveguide portion 37 for the monitoring light isconnected at an output end thereof to an optical fiber 39 for themonitoring light held by a reinforcing member 38, and the monitoringlight 37 a outputted through the optical fiber 39 for the monitoringlight is received by a light-receiving element 40. From thislight-receiving element 40, a monitoring signal is outputted.

Even in the modulator shown in FIG. 3, as the light-receiving element isarranged outside of the container case 41 in which the optical waveguideelement is contained, and connected to the optical fiber for themonitoring light, the modulator is disadvantageous in that the cost ofthe modulator system is high, the limitation on the dimensions and formof the modulator is severe, and the reliability is insufficient.

The optical waveguide modulator equipped with an output light monitor ofthe present invention comprises:

-   -   an optical waveguide element comprising a dielectric substrate        and an optical waveguide formed on a front surface of the        dielectric substrate, the optical waveguide comprising a        plurality of surface optical waveguide portions, an optical        waveguide connecting portion on which the surface optical        waveguide portions are converged and connected to each other and        an output light-outputting optical waveguide portion connected        to the optical waveguide-connecting portion;    -   an optical fiber for output light, connected to an output end of        the output light-outputting optical waveguide portion of the        optical waveguide element;    -   a reinforcing capillary for reinforcing a connection between the        optical waveguide element and the output light-outputting        optical fiber; and    -   a means for receiving monitoring light,    -   wherein    -   the reinforcing capillary is provided with a hole or groove        formed therein for containing and holding the optical fiber for        output light, a connection surface thereof connected to an        output end side surface of the substrate of the optical        waveguide element, and a terminal surface thereof opposite to        the connection surface, to thereby enable the reinforcing        capillary to receive the monitoring light outputted from the        optical waveguide element through at least one member selected        from the capillary itself and the optical fiber for the        monitoring light located in the capillary, to transmit the        monitoring light therethrough and to output the monitoring light        to the outside of the capillary; and    -   the monitoring light-receiving means is located in a position in        which the monitoring light outputted from the reinforcing        capillary to the outside of the capillary can be received, and        is provided with a photoelectric conversion element.

In an embodiment (1) of the optical waveguide modulator equipped with anoutput light monitor of the present invention, the reinforcing capillaryis formed from a light-transmitting material, for example, a transparentglass, to thereby enable radiation mode light generated in the opticalwaveguide connecting portion of the optical waveguide element to passthrough the dielectric substrate and to be received by thelight-transmittable reinforcing capillary, and the radiation mode lightoutputted from the reinforcing capillary to be received, as monitoringlight by the monitoring light-receiving means.

In an optical modulator, containing a Mach Zehnder type waveguide andbeing capable of outputting ON/OFF signal, radiation mode lightgenerated in an OFF mode condition, namely, a condition in which nolight signal is outputted, is radiated in the substrate plate in anoutwardly oblique direction with respect to the output light waveguidethrough which the optical signal output is guided. Usually, theradiation mode light passes through the substrate plate at a radiationangle of about 0.7 degree while receding from the output waveguideportion, and finally is radiated from an end face of the substrate plateto the outside thereof. The quantity of the radiation mode light is in acomplementary relationship with a quantity of the output signal lighttransmitting through the output light-outputting waveguide portion, andthus the light signal output can be monitored by detecting the radiationmode light.

In the optical modulator, an optical fiber is connected to an end faceof the substrate plate to receive an optical signal output from theoptical waveguide and to introduce the optical signal output to theoutside of the modulator. Since the optical fiber has a very small outerdiameter of 125 μm, when the fiber is simply adhered to the substrateplate end face, the resultant bonding strength between the fiber and theend face is insufficient. Therefore, a reinforcing capillary is used asan optical fiber-reinforcing material to cover the optical fiber.Namely, by bonding an end surface of the reinforcing capillary to theend face of the substrate plate, the connection between the opticalfiber and the optical waveguide can be reinforced and protected and thebonding strength between the optical fiber and the optical waveguide canbe increased. Usually, the reinforcing capillary is made from a siliconmaterial or a ceramic material. When the reinforcing capillary isproduced from a material capable of transmitting the signal light andthe radiation mode light therethrough, and has a size sufficiently largeto receiving the radiation mode light radiated from the end face of thesubstrate plate, the radiation mode light can be introduced into thereinforcing capillary.

Referring to FIGS. 4(A) and 4(B), the radiation mode light will beexplained below. In FIG. 4(A), an optical waveguide 30 is formed on adielectric substrate plate 31. The optical waveguide 30 comprises aninput portion (not shown) connected to a light input source (not shown),branched surface waveguide portions 42, 43 branched from the inputportion, output portions 44 and 45 of the branched surface waveguideportions 42, 43, a connection point 46 to which the output portions 44,45 are converged so that the light transmitted through the branchedportions 42 and 44 and 43 and 45 are combined with each other, while thelight interferes, and an output portion 47 extending from the connectionpart 46. When an RF signal is applied to electrodes (not shown) arrangedclose to the branched portions 42 and 43, the optical phases of thelight waves transmitting through the branched portions 42 and 43differently change from each other, and thus when the light waves arecombined with each other in the connection portion 46, the combinedlight waves interfere with each other and the intensity of light changesin response to the RF signal, and resultant optical signal is outputtedthrough the waveguide output portion 47. In this case, light which is ina complementary relationship to the optical signal is radiated, asradiation mode lights 48 and 49 from the connection portion 46 into thesubstrate plate 31 and is transmitted through transmission paths 48 and49 extending in both sides of the output portion 47 in an obliqueoutward directions.

The radiation mode lights 48 and 49 are higher mode lights than singlemode light outputted from the output portion 47 of the optical waveguide30. The radiation mode lights 48 and 49 are different in phase angle of180 degrees from each other.

In FIG. 4(B), an explanatory view of a right side end face, of theoptical waveguide element shown in FIG. 4(A), is shown. In FIG. 4(B), asignal light 50 passing through the output portion 47 of the opticalwaveguide and each of the radiation mode lights 48 and 49 transmittingthrough the radiation mode light-transmission pathes 48 a and 49 a makean angle of about 0.7 degree to each other.

In an example of the embodiment (1) of the optical waveguide modulatorequipped with an output light monitor of the present invention, theterminal surface of the reinforcing capillary formed from thelight-transmittable material is a light-reflective surface, to therebyenable the radiation mode light radiated from the optical waveguideconnecting portion of the optical waveguide element to pass through thedielectric substrate of the optical waveguide element and thereinforcing capillary connected to the output end surface of thedielectric substrate, and to be reflected on the terminallight-reflective surface, and the reflected radiation mode light to bereceived, as a monitoring light by the monitoring light-receiving means.

Also, the reinforcing capillary is preferably in the form of a cylindermade of a transparent glass. In the cylindrical transparent glassreinforcing capillary, preferably, the hole or groove for holding theoptical fiber for the output light is formed along the longitudinal axisof the transparent glass cylindrical capillary, and the longitudinalaxis of the hole or groove intersects the light-reflective terminalsurface at an oblique angle.

Generally, a longitudinal axis of the hole or groove for holding thereinan optical fiber for the output light preferably extends in a directionat a right angle to the connection end surface of the reinforcingcapillary. In the case where the terminal surface of the reinforcingcapillary (a surface of the reinforcing capillary opposite to theconnection end surface on which the reinforcing capillary is connectedto an output end surface of the optical waveguide element) is formed atan oblique angle to the longitudinal direction of the hole or groove forholding therein the optical fiber for the output light, the radiationmode light transmitted through the reinforcing capillary is reflected onthe oblique terminal surface of the capillary, and is radiated to theoutside of the reinforcing capillary (in any of upward, downward,rightward and leftward directions different from the outputtingdirection of the output light. The radiated light can be detected by amonitoring light-receiving means, for example, a photodiode (PD)arranged in the optical waveguide element-containing case, separate fromthe optical waveguide element, the quantity of the radiation mode lightcan be determined and, thus, in response to the detected quantity of theradiation mode light, the quantity of the outlet light outputted fromthe optical waveguide can be monitored.

By establishing the oblique angle and the oblique direction of theoblique terminal surface of the reinforcing capillary, the reflectionradiation direction of the radiation mode light can be established, andthe light-receiving means can be located, fixed and connected at aposition capable of receiving the radiated light. Thus, by establishingthe oblique terminal surface of the reinforcing capillary, the positionof the light-receiving means can be selected so that the function of theoptical waveguide element and the arrangement of each part member arenot affected by the light-receiving means. The oblique terminal surfaceof the reinforcing capillary is optionally covered by a light-reflectivemembrane formed from a metallic material or a dielectric material, tothereby enable the reflection efficiency of the radiation mode light tobe enhanced. The light-reflective membrane can be formed by sputteringmetallic aluminum.

The optical waveguide of the optical waveguide element for the presentinvention is provided with a plurality of surface waveguide portions, awaveguide-connecting portion in which the surface waveguide portions areconnected to each other, and an output waveguide portion connected tothe waveguide-connecting portion, and they are formed in the surfaceportion of the dielectric substrate. The plurality of surface waveguideportions may be branched from a light input waveguide portion, or may bethose capable of receiving light at the end faces thereof opposite tothe waveguide connection portion.

The output end of the optical waveguide is connected to an end face ofan output light-outputting optical fiber. The connecting end portion ofthe optical fiber is reinforced by a reinforcing capillary. Thereinforcing capillary has a size sufficient to receive the radiationmode light radiated from the optical waveguide and pass the radiationmode light therethrough. The reinforcing capillary has an end facethereof bonded to an output end face of the optical waveguide element toprovide a connection end face, and an opposite terminal surface inclinedwith respect to the connecting end face to provide an inclined terminalsurface. As mentioned above, the reinforcing member has a hole or groovethrough which the connection end face and the inclined terminal surfaceare connected to each other and in which the output light-outputtingoptical fiber is held. The hole or groove is formed along thelongitudinal axis of the reinforcing capillary and the longitudinal axisand the inclined terminal surface intersect each other at an obliqueangle. The groove may be covered after the optical fiber is placed inthe groove, or not covered. The end face of the optical fiber held inthe hole or the groove of the reinforcing capillary is connected to theoutput end face of the optical waveguide, as mentioned above.

FIG. 5 is an explanatory plan view showing a constitution of anembodiment of the optical waveguide modulator equipped with an outputlight monitor of the present invention, in which no ceiling plate isshown. FIG. 6 is an explanatory front view of the modulator of FIG. 7,and FIG. 7 is an explanatory side view showing the constitution of theconnection part of the end face of the optical waveguide element of themodulator of FIGS. 5 and 6 with the optical fiber and the reinforcingmember.

In FIGS. 5, 6 and 7, on a substrate plate 51 of an optical waveguideelement, a Mach-Zehnder type (MZ type) optical waveguide 52 andelectrodes 53 for controlling the waveguide are arranged, and an outputsignal light 54 is outputted from the output end of the opticalwaveguide 52. Radiation mode light 56 is radiated from the connectingportion 55 of the optical waveguide 52, passes through the substrateplate 51 and is radiated toward the outside of the substrate plate 51.

The modulator is contained in a modulator box 57, input light 58 isinputted into the optical waveguide 52 through an input side opticalfiber 59. The optical fiber 59 is supported and reinforced with an inputside fiber-reinforcing member 60, and an end of the optical fiber 59 isconnected to an input end of the optical waveguide 52. The controlelectrodes 53 are controlled by control signal which is inputted intothe electrodes through a connector 61 for inputting the control signaland outputted therefrom through a connector 62 for outputting thesignal.

The output end face of the optical waveguide element is connected to aconnecting end face of the reinforcing capillary 63, to enable theradiation mode light 56 transmitted through the substrate plate 51 to beintroduced into the inside of the reinforcing capillary 63. Theradiation mode light 56 is reflected on an inclined terminal surface 64of the reinforcing capillary 63 and is radiated toward the outside ofthe reinforcing capillary. The radiated radiation mode light is receivedby a light-receiving means 66 and is monitored. The monitor signaloutput from the light-receiving means 66 is outputted through aconnector 67 located on the box 57. A light-outputting optical fiber 68is supported in a hole formed in the reinforcing capillary 63, and anend face of the optical fiber 68 is connected to an output end face ofthe optical waveguide 52.

In the input end portion of the optical waveguide element shown in FIGS.5, 6 and 7, an end face of the input side optical fiber 59 is connectedto an input end face of the optical waveguide 52, and these connectingportions are reinforced by an input side reinforcing member 60. Inputlight 58 is inputted into the optical waveguide 52 through the opticalfiber 59.

The above-mentioned members connected with each other are contained inthe box 57, and an upper opening of the box is closed and sealed with aceiling plate (not shown in FIGS. 5 to 7).

The other ends of the input side and output side optical fibers areextended to the outside of the box through fiber guide holes formed inthe box. The fiber guide holes may be sealed, or the above-mentionedmembers placed in the box may be fixed to the box and the ceiling plateand holes formed in the box may not be sealed.

In the modulator of the present invention, where the radiation modelight is utilized as a monitoring light, the reinforcing capillary isformed from a radiation mode light-transmitting material. Thereinforcing capillary used for this case is formed from transparentsilicon materials (silicon single crystal), glass materials (forexample, guartz glass or boro-silicate glass), or ceramic materials.There is no specific limitation to the form and the dimensions of thereinforcing capillary, as long as the resultant reinforcing capillary isusable for monitoring the radiation mode light. Preferably, thereinforcing capillary is in the form of a cylinder having a hole. Thehole or groove of the reinforcing capillary for supporting the opticalfiber is preferably formed along the longitudinal axis of thecylindrical reinforcing capillary, and the longitudinal axis intersectsthe inclined end face of the cylindrical reinforcing capillary at anoblique angle.

The radiation mode light reflected on the light reflective terminalsurface of the cylindrical reinforcing capillary having the hole istransmitted toward a periphery of the capillary and then is outputted asa monitoring light through the periphery of the cylindrical reinforcingcapillary; the outputted monitoring light is converged by a lens effectof the periphery of the cylindrical reinforcing capillary; and theconverged monitoring light is received by the monitoring light-receivingmeans.

As shown in FIG. 6, a first strain-preventing groove 69 is formed on aportion of the bottom surface of the reinforcing capillary 63 and closeto the connection surface of the reinforcing capillary, and a secondstain-preventing groove 70 is formed on a portion of the bottom surfaceof the reinforcing capillary and close to the inclined terminal surfaceof the reinforcing capillary. The first stain-preventing groove 69 canreceive therein an excessive amount of an adhesive agent applied betweenthe connection surfaces of the reinforcing capillary and the opticalwaveguide element to prevent staining of the periphery of thereinforcing capillary through which the radiation mode light isoutputted. Also, the second stain-preventing groove 70 can receivetherein an excessive portion of an adhesive agent applied between theoptical fiber for the output light and the hole or groove of thereinforcing capillary to prevent staining of the periphery of thereinforcing capillary through which the radiation mode light isoutputted.

Also, in an embodiment of the modulator of the present invention, theterminal surface of the reinforcing capillary may be formed into acurved surface projecting outward to thereby enable the monitoring lighttransmitted through the reinforcing capillary to be reflected andconverged on the curved terminal surface, and then to be received by themonitoring light-receiving means.

The above-mentioned optical waveguide modulator equipped with an outputlight monitor of the present invention exhibits the followingadvantages.

(1) The structure is simple.

Namely, in the modulator equipped with the output light monitor of thepresent invention, the form and constitution of the light intensitymodulator and the assembling method and technique for the opticalelements are the same as those having no output light-monitor and thusno new technology is necessary.

(2) The monitoring output light is transmissible through space and thusno optical fiber for transmitting the monitoring light is necessary.

Thus when the optical waveguide element is placed in and fixed to thebox, specific procedures for connecting an optical fiber to a waveguidefor outputting the monitoring light, for fixing the light-receivingmeans to the optical waveguide element and for distributing electriccircuits for the light-receiving means, are unnecessary. Also, thelight-receiving means and electric circuits thereof can be preliminarilyarranged in the box. Further, no specific design for carrying out theabove-mentioned procedures is necessary for the box.

(3) The monitoring light can be radiated in any direction.

Thus, the location of the light-receiving means can be freelyestablished and, thus, as the light-receiving means can be arranged inopen space in the box, no specific design for arranging thelight-receiving means in the box is necessary.

(4) The radiation mode light is utilized.

The radiation mode light which is usually not utilized for non-lightintensity modulator is utilized as monitoring light, and thus not onlyno specifically designed portion of the optical waveguide element, forexample, a branched portion of the optical waveguide for outputting themonitoring light, is necessary, but also no increase in lighttransmission loss which is a possible problem of the modulator does notoccur.

Accordingly, the conventional type of light intensity modulator can beused for the modulator equipped with the output light monitor withoutarranging the branched portion of the optical waveguide element for themonitoring light and the lens for picking up the monitoring light.

In another example of the embodiment (1) of the optical waveguidemodulator equipped with an output light monitor of the presentinvention, the terminal surface of the reinforcing capillary formed fromthe light-transmittable material is provided with a surface portion inwhich the monitoring light is reflected and a non-monitoring surfaceportion, whereby when the radiation mode light radiated from the opticalwaveguide connection portion of the optical waveguide element throughboth side portions of the output light-outputting optical waveguideportion transmit through the dielectric substrate of the opticalwaveguide element and the reinforcing capillary connected to the outputend surface of the dielectric substrate, only a portion of the radiationmode light radiated to one side portion of the output light-outputtingoptical waveguide portion is reflected on the monitoringlight-reflecting surface portion of the reinforcing capillary toward themonitoring light-receiving means, received as a monitoring output lightby the monitoring light-receiving means, and another portion of theradiation mode light which reaches the non-monitoring surface portion isnot received as a monitoring light by the monitoring light-receivingmeans.

In this case, preferably, the terminal reflecting surface portion of thereinforcing capillary intersects the direction of the longitudinal axisof the hole or groove in which the output light-outputting optical fiberis received, at an oblique angle, to thereby enable the radiation modelight reflected on the terminal reflecting surface portion to bereceived, as monitoring light, by the monitoring light-receiving means.

Also, the reinforcing capillary is preferably in the form of a cylinderhaving a hollow as a hole as mentioned above. In this case, the portionof the radiation mode light reflected on the reflecting surface portionof the cylindrical reinforcing capillary is outputted, as monitoringlight, through the periphery of the cylindrical reinforcing capillary,and the converged by the lens effect of the periphery of the cylindricalreinforcing capillary, and the converged monitoring light is received bythe monitoring light-receiving means.

FIG. 8 shows an example of waveforms of light reflected on thereflecting terminal surface, and monitored by and outputted from thelight-receiving means in the modulator as shown in FIGS. 5 and 7. InFIG. 8, a curve 71 shows a waveform of the light signal 54 outputtedthrough the output optical fiber 68, and a curve 72 shows a waveform ofthe light when the reflected radiation mode light 65 is monitored by aphotoelectric conversion element of the light receiving means 66. Theoptical waves 71 and 72 different from each other are in a supplementaryrelation to each other.

In the modulator shown in FIGS. 5 to 7, a portion of the radiation modelight reflected on a lower half portion of the reflecting terminalsurface of the reinforcing capillary 63 and close to the light receivingmeans 66 and another portion of the radiation model light reflected onan upper half portion of the reflecting terminal surface of thecapillary 63 and far from the light receiving means 66 are respectivelyintroduced into incidence rectangular areas 73 and 74, as shown in FIG.9, of the light receiving surface of the light receiving means 66. Whenportions of the rectangular area 73 and 74 are overlapped on each other,portions of the radiation mode light introduced into an overlapped area75 interfere with each other, and thus a problem such that themonitoring light output of the photoelectric conversion element in thelight receiving means varies due to disturbances, such as environmentaltemperature and others, may occur.

This problem can be resolved by the following manner.

In an optical waveguide modulator equipped with an output light monitorof the present invention as shown in FIG. 10, a monitoringlight-reflecting surface is formed in a half portion of the terminalsurface of a reinforcing capillary and a non-monitoring surface for notallowing the radiation mode light to be received by a light receivingmeans is formed in another half portion of the terminal surface, tothereby enable a portion of the radiation mode light transmittingthrough the inside portion 63 a of the capillary 63 to be reflected onlyon about half portion of the terminal surface of the reinforcingcapillary 63 toward the light receiving means (photoelectric conversionelement) and to be received by the light receiving means.

In FIG. 10, an end surface 76 a of the output end portion of thesubstrate plate 51 and of the output end portion of a reinforcing member76 adhered to the substrate plate 51 is formed at an oblique angle, forexample, of 5 degrees, from a plane 47 a at a right angle with respectto a longitudinal center axis of a optical waveguide output portion 47.

The capillary 63 has a longitudinal center axis extending at an obliqueangle from the longitudinal direction of the optical waveguide outputportion 47, and thus the output end of the optical waveguide outputportion 47 and a connection end of an optical fiber (not shown in FIG.10) are connected to each other at an oblique angle to each other. Forexample, an end face 76 a of the reinforcing member 76 and a plane 78 aformed at right angles with respect to the longitudinal center axis 78of the hole 77 for the optical fiber of the reinforcing capillary 63make an oblique angle of 7 degrees.

In FIG. 10, a reflecting surface is formed on an upper half portion 79(namely an about half portion close to the light receiving means 66) ofthe terminal surface of the capillary 63 and only a portion of theradiation mode light 80 reflected on the upper half reflecting surfaceportion 79 is received by the light receiving means 66. A lower halfportion of the terminal surface of the reinforcing capillary 63 is cut,as shown in FIG. 10, to a depth W from the terminal surface, and aterminal lower half portion 81 of the reinforcing capillary 63 isremoved to a depth F from the periphery of the capillary 63. Due to theremoval of the portion 81, on a terminal surface portion 82 formed inthe lower portion of the reinforcing capillary 63, the radiation modelight is reflected in a direction shown by an arrow 82 a, and thus thereflected radiation mode light is not received by the light receivingmeans 66. For this reasons, a portion of the radiation mode lightreflected on the lower half portion of the terminal surface of thereinforcing capillary is not received by the light receiving means andthus no interfering surface area such as surface area 75 shown in FIG. 5is formed. Therefore, the monitoring light outputted from thephotoelectric conversion element of the light receiving means isstabilized.

As angle between the terminal reflecting surface 79 and the longitudinalcenter axis 77 a of the hole 77 is established so that the reflectedlight can be received by the light receiving means 66, preferably in therange from 40 to 46 degrees. The length of the reinforcing capillary 63is established so that the optical fiber can be steadily held in thecapillary, preferably in the range from 2 to 4 mm, and the diameter ofthe reinforcing capillary 63 is established so that a reflectingterminal surface necessary to enable the light receiving means toreceive a desired amount of the radiation mode light can be formed and,usually, the diameter of the reinforcing capillary 63 is preferably inthe range of from 0.25 to 2.5 mm. The radiation mode light reflected onthe reflecting surface 79 of the reinforcing capillary 63 preferablyenters, as an incident light, into a light receiving surface of thephotoelectric conversion element of the light receiving means atapproximately a right angle to the light receiving surface.

The periphery of the reinforcing capillary is preferably in the form ofa cylindrical periphery. In this case, the periphery surface of thecapillary exhibits a lens effect of a circular cylinder periphery havinga finite (limited) focal distance. Preferably, the light receivingsurface of the photoelectric conversion element is arranged on or aroundthe focus of the lens to thereby make the S/N better.

By the removal of the lower half portion 81 of the terminal surfaceportion of the reinforcing capillary 63, as shown in FIG. 10, thefollowing advantages can be obtained.

(1) For the purpose of passing the optical fiber 76 through the hole 77of the reinforcing capillary 63, the diameter of the hole 77 ispreferably as large as possible. However, since the angle of radiationof the radiation mode light is about 0.7 degree which in small, for thepurpose of causing the radiation mode light to transmit through theinside 63 a of the capillary, the diameter of the hole is preferably assmall as possible. Accordingly, the hole is formed at an inside diameterof 1 μm larger than the outside diameter of the optical fiber. In thiscase, when whole the terminal surface of the reinforcing capillary is inthe form of an inclined surface, as shown in FIGS. 5 and 6, it is verydifficult to introduce the optical fiber into the hole. Also, usually,to make easy the introduction of the optical fiber into the hole,usually a tapered portion is formed in the optical fiber introductionportion of the hol. However, the tapered optical fiber-introductionportion cannot be employed due to the same reasons as mentioned above.However, when the structure shown in FIG. 10 is used, a portion of thehole facing the removed portion 81 can work as a groove for introducingthe optical fiber into the hole, and can guide the optical fiber and cancause the introduction of the optical fiber into the hole to be easy.(2) Also, the optical fiber is adhered and fixed with an adhesive in thehole of the reinforcing capillary after alignment of the fiber toreinforce the fiber. In this case a problem such that the adhesivestains the reflecting terminal surface of the capillary, and thereflecting property of the terminal surface is varied, may occur. Thevacant portion 81 serves as a trap for the adhesive to prevent thestaining of the reflecting terminal surface 79.

In the terminal surface of the reinforcing capillary 63, to cause thevacant portion 81 of the reinforcing capillary 63 to exhibit theabove-mentioned effects, preferably, a boundary line betweenapproximately a half portion of the terminal surface of the reinforcingcapillary which serves as a reflecting surface and another approximatelyhalf portion of the terminal surface is located between a transmittingpath of a portion of the radiation mode light which transmits toward thelight-reflecting terminal surface portion and another transmitting pathof another portion of the radiation mode light which transmits towardthe another portion of the terminal surface; and the boundary line ispositioned between a center line of the terminal surface of thereinforcing capillary intersecting the longitudinal axis of the hole andextending in the same direction as that of the boundary line, and atangential line extending in parallel to the center line and coming intocontact with a portion of a periphery line of the hole of thereinforcing capillary from which portion of the periphery line, thelight-reflecting surface portion is formed. Namely, in FIG. 10, in viewof a cross-section at a right angle to the longitudinal center axis ofthe hole of the reinforcing capillary 63, as shown in FIG. 11, it ispreferable that a boundary line 83 between the half portion forming thereflecting surface 79 and the vacant portion 81 be located between thetransmitting paths 48 a and 49 a of the radiation mode light, and alsobetween the center line 84 intersecting the center axis 77 a of the hole77 and the tangential line 85 coming into contact with the peripheryline of the hole 77. In the other words, in FIG. 10, the cutting depth Fof the vacant portion from the periphery of the reinforcing capillary,the radins R of the reinforcing capillary and the radins r of the holepreferably satisfy the following relationship.R≦F≦R+r

The reinforcing capillary 63 and the hole 77 are preferably in aconcentric relationship with each other. However, optionally, they arein a slight excentrical relationship to each other to an extent suchthat the resultant reinforcing capillary can effect the desiredreflection for the radiation mode light. Also, the cutting depth W fromthe terminal surface of the reinforcing capillary for forming the vacantportion 81 can be established as desired, and is preferably in the rangeof from 0.2 to 1 mm, so that both the easy of the cutting procedure andthe mechanical strength of the resultant reinforcing capillary aresatisfactory. Further, to remove the influence of reflection of theradiation mode light on the interface 76 a between the reinforcingmember 76 and the substrate plate 51, preferably the interface 76 a isformed with an oblique angle of about 5 degrees with respect to theplane 47 a which is normal to the optical waveguide output portion 47and with an oblique angle of about 7 degrees with respect to the plane78 a which is normal to the longitudinal direction of the hole 77 of thereinforcing capillary 77.

On the radiation mode light-reflecting terminal surface portion 79 ofthe reinforcing capillary 63, a light reflective membrane is preferablyformed by depositing a metal membrane, for example, gold, chromium oraluminum membrane or a dielectric multi-layered membrane, for example,formed from at least one TiO₂ layer and at least one SiO₂ layeralternately laminated on each other, to enhance the reflectance of thereflecting terminal surface.

The terminal surface of the reinforcing capillary optionally has aportion thereof formed into a curved surface projecting outward, tothereby enable the monitoring light passing through the reinforcingcapillary to be reflected on the curved surface portion of the terminalsurface, and to be converged into and received by the monitoring lightreceiving means.

As a photoelectric conversion element of the light receiving means, aphotosemiconductor diode (PD) is preferably employed. In this case, theradiation mode light is received by the PD, the received light isconverted to electric signal by the PD, and an electric signal isoutputted from the PD.

FIG. 12 shows another embodiment of the optical modulator of the presentinvention. In FIG. 12, a substrate plate 51 formed from a strongdielectric material, for example, LiNbO₃ is fixed in a box (case) 57, anoptical waveguide 52 is formed in the surface portion of the substrateplate. The optical waveguide 52 has an optical waveguide input portion86, branched portions 87 and 88 branched from the input portion 86,output portions 44 and 45 of the branched portions 87 and 88, connectingportion 46 of the branched portions, and output portion 47, andelectrodes 53 and 53 a are arranged on the branched portions 87 and 88.An input portion-reinforcing member 89 is arranged in the input endportion of the substrate plate 51, an input side capillary 90 isconnected to the input end face of the substrate plate (however, in FIG.12, the capillary 90 and input end face of the substrate plate 51 arespaced from each other), an input side optical fiber 91 is introducedinto a hole (not shown in FIG. 12) of the reinforcing capillary 90, andan end face of the optical fiber 91 is connected to the input end faceof the optical waveguide input portion 86.

The optical waveguide output portion 47 is connected to the output sidereinforcing capillary 63 and the output side optional fiber 78, in thesame manner as in FIG. 10.

When light is inputted into the optical waveguide input portion 86through the input side optical fiber 91 reinforcing by the reinforcingmember 90, the inputted light is distributed to the branched portions of87 and 88, and an electric signal 92 is applied to the electrodes 53 and53 a through, for example, a connector 93 arranged on a side surface ofthe box 57, the optical phase of the light waves transmitting throughthe branched portions 87 and 88 varies in response to the appliedsignal, the light waves are incorporated to each other in the connectingportion 46, and interfere with each other to generate signal light. Thesignal light generated by the interference is outputted to the outsideof the box 57 through the optical fiber 78 reinforced by the capillary63.

In two portions 48 and 49 of the radiation mode light radiated at theconnecting portion 46 to the two sides of the optical waveguide outputportion for the output light in the substrate plate 51, the radiationmode light portion 48 is transmitted through the inside 63 a of thecapillary 63 and is reflected on the reflecting surface 79 formed in anupper half portion of the terminal surface of the capillary 63, thereflected light portion is converged on the cylindrical periphery of thecapillary 63 and is radiated in a direction approximately at a rightangle to the output portion 47 of the optical waveguide namely adirection substantially normal to the side surfaces of the box 57. Theradiated light beam 94 is received by a light receiving surface of alight receiving means 66 (photoelectric conversion element, PD) arrangedat an angle which is substantially normal to the light beam 94 and whichdoes not allow a portion of the light beam reflected on the lightreceiving surface to return to the reflecting surface of the capillary,and fixed on the side surface of the box 57.

The received radiation mode light signal is converted to electric signalby the photoelectric conversion element, and the resultant electricsignal 95 is outputted, as output light monitoring signal, to theoutside of the box 57 through a connector 96.

The radiation mode light 49 radiated from the connecting portion 46passes through the inside 63 a of the capillary 63 and reaches the endface 82 of the vacant portion 81 formed in the lower half portion of theterminal portion of the capillary 63 and is reflected on the end face 82in a direction in which the reflected light does not reach the lightreceiving means 66.

The monitoring function as mentioned above can be obtained by an opticalelement having, for example, a Mach-Zehnder type optical waveguide inwhich branched portions are incorporated with each other at a Y-shapedconnection.

In the optical modulator of the present invention, the constitution ofthe non-monitoring half portion in the terminal surface of thelight-output side reinforcing capillary so that a portion of theradiation mode light transmitted through the light-output sidereinforcing capillary is not received by the photoelectric conversionelement of the light-receiving means, is not limited to the embodimentsas shown in FIGS. 10, 11 and 12. The non-monitoring half portion may beformed by a non-reflective surface for the radiation mode light, or theportion of the radiation mode light reflected on the non-monitoring halfportion may be intercepted by a light-intercepting means arrangedbetween the periphery of the capillary and the photoelectric conversionelement, or a means for intercepting the portion of the radiation modelight transmitting through the inside of the capillary toward thenon-monitoring half portion of the terminal surface, for example, alight-intercepting concavity or a light-intercepting plate, may bearranged or formed in the inside of the reinforcing capillary.

In FIGS. 10, 11 and 12, an embodiment of the optical modulator in which,to reduce the reflection of the radiation mode light on the end face ofthe substrate plate, the end face of the substrate plate is inclined atan angle of about 5 degrees in the surface direction (horizontaldirection) of the substrate plate, from a plane normal to the extendingdirection of the optical waveguide output portion 47, is explained. Incase where the end face of the substrate plate is inclined with respectto the surface of the substrate plate, the capillary is formed as shownin FIG. 13, to make the forming of the capillary easy.

In FIG. 13, a substrate plate 51 and a reinforcing member 76 for thesubstrate plate are arranged on a bottom surface of a box 57 andsupported by a supporting member 57 a, the output side end faces of thesubstrate plate and the reinforcing member is formed at an inclinedangle from a plane normal to the surface of the substrate plate 51, andthe inclined output side end face of the substrate plate 51 is connectedto an end face of a reinforcing capillary 63 in such a manner that alongitudinal center line of a hole (not shown) of the reinforcingcapillary is inclined at an angle of 42 to 48 degrees from the surfaceof the substrate plate. A terminal surface 79 of the reinforcingcapillary 63 is imaginarily divided into two half parts (in this case, aright half part and a left half part) by a intersecting line of theterminal surface 79 with a plane parallel to a vertical plane includingthe longitudinal center line of the hole of the capillary 63, a halfpart of the terminal surface 79 is employed as a reflecting surfaceportion, and a portion of the radiation mode light reflected on thereflecting surface portion is converged by the cylindrical periphery ofthe capillary, and the converged light beam is received by alight-receiving surface of a photoelectric conversion element of thelight receiving means 66 (arranged, for example, on the bottom surfaceof the box 57). The other half part of the terminal surface of thereinforcing capillary is a non-monitoring surface portion. A boundaryline between the reflecting surface portion and the non-monitoringsurface portion is preferably established in the same manner as shown inFIG. 11, and the non-monitoring surface portion may be established in amanner as mentioned above.

The optical waveguide modulator equipped with an output light monitor ofthe present invention, as shown in FIGS. 10 to 13, exhibits thefollowing advantages.

(1) The constitution of the modulator is simple.

Namely, the form and constitution of the optical intensity modulatorelement and production method and technique of the element are the sameas those of the conventional element having no monitor, and thus no newtechnology is necessary.

(2) The monitoring output light is transmitted through space and thus nolight guiding optical fiber is necessary for the monitoring outputlight.

Thus, when the optical waveguide element is joined in the box, noconnection of an optical fiber with a monitoring light-outputtingoptical waveguide and no connection of a light receiving element to anoptical waveguide element, no circuit arrangement and no other specificoperations are necessary. Also, the light receiving element and circuitthereof can be arranged in the box before the optical waveguide elementis fixed in the box. Also, no specific design of the box for carryingout the above-mentioned operations is necessary.

(3) The monitoring light can be radiated in a desired direction.Accordingly, the light receiving element can be freely located in adesired position. Namely, the light receiving element can be located inany vacant portion of the box. No specific design of the box isnecessary to locate the light receiving element in the box.(4) Radiation mode light is utilized.

The radiation mode light which is usually wasted in the conventionaloptical intensity modulator, is utilized as monitoring light, and thus,not only does the optical waveguide element need no specificallydesigned portions such as branched portions for outputting themonitoring light, but also, no increase in transmission loss of light,which is important for the modulator, occurs.

Therefore, the conventional type of optical intensity modulator can beutilized in the present invention without modification, and no branchedportions of the optical waveguide for the monitoring light and no lensfor taking out the monitoring light is necessary.

(5) Disturbance variation in monitoring light output due toenvironmental weather is little or none and thus the monitoring can beprecisely effected.

Namely, in the optical waveguide modulator equipped with an output lightmonitor of the present invention, the radiation mode light is utilizedas monitoring light, and thus, a monitoring light-detecting means havinga simple constitution can be easily arranged, and the variation inmonitoring light output due to disturbance is little or none. Thus, themodulator of the present invention can be advantageously used inpractice.

In embodiment (2) of the optical waveguide modulator equipped with anoutput light monitor, the optical waveguide of the optical waveguideelement has a monitoring light-outputting optical waveguide portionconnected to the waveguide-connection portion, in addition to the outputlight-outputting optical waveguide portion, to thereby output themonitoring light through the output end of the monitoringlight-outputting optical waveguide portion.

In an example of embodiment (2) of the present invention, an end face ofan optical fiber piece for outputting the monitoring light is connectedto the outputting end of the monitoring light-outputting waveguideportion;

the optical fiber piece for outputting the monitoring light is held is agroove for the monitoring light, which groove is formed in thereinforcing capillary and is longer than the optical fiber piece foroutputting the monitoring light; an end face of the groove for themonitoring light, facing the output end face of the optical fiber piecefor outputting the monitoring light constitutes a reflecting surface forthe monitoring light, whereby the monitoring light outputted through theoutput end of optical fiber piece for outputting the monitoring light isreflected on the above-mentioned reflecting surface, and the reflectedmonitoring light is received, as an outputted monitoring light, by themonitoring light-receiving means.

FIG. 14 shows an explanatory plan view of the optical waveguidemodulator equipped with an output light monitor of embodiment (2) of thepresent invention. FIG. 15 shows an explanatory partiallycross-sectional front view of the modulator of FIG. 14, and FIG. 15 is agraph showing examples of wave forms of main signal light and monitoringlight outputted from the modulator of the present invention shown inFIGS. 14 and 15.

In FIGS. 14, 15 and 16, an optical waveguide modulator 101 has amodulator chip 102, a reinforcing capillary 103 and a monitoringlight-receiving means 104. The modulator chip 102 has the sameconstitution as that of a modulator chip 102 shown in FIG. 15. In FIGS.14 and 15, only a portion of the modulator chip 102 is shown.

In the modulator chip 102, a surface waveguide is formed in a surfaceportion of a substrate plate 104 consisting of a dielectric material(LN) or a semiconductor material (GaAs). The surface waveguide has aplurality of surface waveguide portions 105 and 106, a connectionportion 107 in which the waveguide portions 105 and 106 are convergedand connected to each other, a main output waveguide portion 108 and amonitoring light output waveguide portion 109. An opticalfiber-supporting base plate 110 of the reinforcing capillary 103 isconnected to an output side end face of the substrate plat e 104. Thisconnection is reinforced by a reinforcing member 111.

The main output waveguide portion 109 is connected to an end face of amain output optical fiber 112. The main output optical fiber 112 issupported in a main output V-shaped groove 113 formed in an opticalfiber-supporting base plate 110 of the reinforcing capillary 103, theopposite end portion of the main output optical fiber 112 extend outwardover the optical fiber-supporting base plate 110, whereby to output themain output light 114 transmitted through the main output optical fiber112 to the outside of the modulator 101.

The V-shaped groove 113 has a pair of inclined side surfaces facing eachother and extending along the longitudinal direction of the groove.

The monitoring light output waveguide portion 108 is connected to an endface of a monitoring light output optical fiber 115, and the monitoringlight output optical fiber 115 is supported in a V-shaped groove 116 forthe monitoring light, formed separately from the V-shaped groove for themain output light. The V-shaped groove 116 for the monitoring light hasa pair of inclined side surfaces extending along the longitudinaldirection thereof and facing each other and an inclined end surface 117oblique with respect to the longitudinal axis of the groove 116, an endface of the monitoring light output optical fiber piece 115 faces theinclined end face 117, whereby the monitoring light 118 is radiatedthrough the other end face of the monitoring output optical fiber piece115 toward the inclined inside end surface 117. The radiated monitoringlight 118 is reflected upward on the inclined end surface 117.

A monitoring light-receiving means 104 is located above the V-shapedgroup 116 for the monitoring light. The monitoring light-receiving means104 includes a photoelectric conversion element (a photodiode (PD)) 119.The photoelectric conversion element 119 receives the monitoring light118 reflected on the inclined end surface 117 of the V-shaped groove 116for the monitoring light and converts the received light to an electricsignal. The photoelectric conversion element 119 is supported by asupporting member 120.

The optical fiber-supporting base plate 110 is constituted from, forexample, a Si single crystal, and the inclined side surfaces of theV-shaped groove 113 for the main output light and the inclined sidesurfaces and the inclined end surface of the V-shaped groove 116 for themonitoring light are formed by applying an anisotropic etching to the Sisingle crystal. In this etching, the plane <111> of the Si singlecrystal is selectively etched to form a V-shaped groove having anoblique angle of 54.7 degrees. The form and the top end width of theV-shaped groove can be certainly established by photolithography, andthe top end of the V-shaped groove can be formed at a desired width.

As shown in FIG. 15, the upper portions of the peripheries of theoptical fibers 112 and 115 supported in the V-shaped groove 113 for themain output light and the V-shaped groove 116 for the monitoring lightpreferably projects upward over the upper end face 121 of the opticalfiber-supporting base plate 110, and the height of the projection ispreferably 30 μm or more and ½ or less of the outside diameter of theoptical fiber. In this projection height, a center line 122 of theoptical fiber is located below the upper surface 121 of the opticalfiber-supporting base plate 110. In the reinforcing capillary 103, aguard plate 122 is arranged on the optical fibers 112 and 115.

In view of the applied voltage-light output relationship shown in FIG.16, it is clear that the wave form of main output light 114 and the waveform of the monitoring light 118 are in a supplementary relationship toeach other, and the output conditions of the main output light 114 canbe accurately detected by the monitoring light 118.

As FIG. 17 shows, the main output optical fiber 112 and the monitoringlight output optical fiber 115 supported respectively in the V-shapedgrooves 113 and 116 of the optical fiber-supporting base plate 110 ofthe reinforcing capillary 103 are adhered to and fixed in the V-shapedgrooves 113 and 116 by an adhesive 123, and are stabilized by atransparent guard plate 122 as shown in FIGS. 15 and 16. A reinforcingmember 111 reinforces the connection between the dielectric base plate104 of the modulator chip 102 and the optical fiber-supporting baseplate 110.

In FIGS. 14 and 15, the monitoring light outputted through themonitoring light output waveguide portion 30 is radiated from the endface of the monitoring light output optical fiber 108 toward theinclined end surface 117 of the V-shaped groove 116 for the monitoringlight, the radiated monitoring light is reflected upward on the inclinedend surface 117, and the reflected monitoring light 118 passes throughthe guard plate 122 and is received by the photoelectric conversionelement (photodiode, PD) 119 by which the received monitoring light isconverted to electric signal. The electric signal is inputted, as inputsignal into the bias control circuit (not shown in FIGS. 14 and 15), asshown in FIG. 2, and the photoelectric conversion element forcontrolling the modulator may be fixed to the guard plate 122.

In FIGS. 18(A), 18(B) and 18(C), examples of the V-shaped grooves forthe monitoring light, formed from silicon are shown in detail. FIG.18(A) is an explanatory partial plan view of the V-shaped groove 116,FIG. 18(B) is an explanatory cross-sectional view the V-shaped groove116 along a line A-A of FIG. 18(A), and FIG. 18(C) is an explanatorycross-sectional view of the V-shaped groove along a line B-B, of FIG.18(A).

In FIGS. 18(A), 18(B) and 18(C), a V-shaped groove 116 is formed byetching in an optical fiber-supporting base plate 110 and below theupper surface 121 of the base plate. The V-shaped groove 116 has sidesurfaces 124 and 125 intersecting each other at a bottom line 126. Also,the V-shaped groove 116 has an inclined end surface 117 at an obliqueangle to the longitudinal axis of the groove.

Each of the side surfaces 124 and 125 and the inclined end surface ofthe groove is a formed by a <111> plane of a silicon single crystal andeach have an oblique angle of 54.7 degrees to the upper surface 121.

The inclined end face 117 of the V-shaped groove 116 for the monitoringlight is optionally coated with a high reflectional coating, forexample, an Au membrane, to enhance the reflectance of the inclined endface. Preferably, to increase the reflected light amount, the depths ofthe V-shaped grooves 113 and 116 is established so that the longitudinalcenter line 122 of the monitoring light output optical fiber 115 islocated below the level of the upper surface 121 of the opticalfiber-supporting base plate 110. When the center line of the opticalfiber 115 is located above the level of the upper surface 121, themonitoring light may be reflected in a decreased light volume on theinclined end face, and thus a disadvantage, that the reflectedmonitoring light is received in an insufficient light volume by thelight receiving means, may occur.

For the purpose of arranging the main light output optical fiber 112 andthe monitoring light output optical fiber 115 properly by using theguard plate 122, it is preferable that the upper portions of theperipheries of the optical fibers 112 and 115 project above the uppersurface 121 of the optical fiber-supporting base plate 110 at a light of30 μm or more but not more than ½ of the outer diameters of the opticalfibers. Also, preferably, the depths of V-shaped grooves 116 and 113 beestablished so that the light of the projected upper portions of theperipheries of the optical fibers above the optical fiber-supportingbase plate 121 is 30 μnm or more but not more than ½ of the outerdiameters of the optical fibers.

In FIGS. 19(A) and 19(B), examples of constitutions of connectingportion of the optical waveguide 107 at which two output light waveguideportions, namely the main light output waveguide portion 109 and themonitoring output light waveguide portion 108, are converged thereintoand connected with each other, and then the main light-outputtingwaveguide portion 109 and the monitoring light-outputting waveguideportion 108 are separated from each other, are shown.

In FIG. 19(A), the waveguide connecting portion 107 is formed from an Xcoupler or a directional coupler 127.

When a 3 dB coupler is used as a directional coupler, the function ofthe resultant coupler is the same as the X-coupler. In FIG. 19(B), themain light-outputting waveguide portion 109 is connected to thewaveguide connecting portion 107, a directional coupler 128 for TAP isarranged on a portion of the main light-outputting waveguide portion109, to separate a portion of the output light and to provide amonitoring light-outputting waveguide portion 108.

The optical fiber piece 115 for the monitoring light usable for thepresent invention may be formed from a single mode fiber, and ispreferable formed from a multi-mode fiber (for example, G150 or G162).When the multi-mode fiber is used, the alignment of the fiber is easy.

Usually, the waveguide chip usable for the modulator of the presentinvention has a width of about 1 to 3 mm. Usually, since a maximumcurvature of the waveguide at which the waveguide can be heat withoutbeing damaged is about 5000 mm, the bending of the monitoringlight-outputting waveguide portion 108 as shown in FIGS. 20(A) and 20(B)to enable the monitoring light to be directly introduced into thephotoelectric conversion element (PD) 119 is practically impossible.

In another example of the embodiment (2) of the optical waveguidemodulator equipped with an output light monitor, an end face of themonitoring light-outputting optical fiber piece is connected to anoutput end of the monitoring light-outputting optical waveguide portion;

-   -   the monitoring light-outputting optical fiber piece is held in a        hole or groove formed in the reinforcing capillary and is not        longer than the monitoring light-outputting optical fiber;    -   the hole or groove for the monitoring light formed in the        reinforcing capillary inclines in a manner such that the farther        the hole or groove for the monitoring light from the connection        surface waveguide element, the farther the hole or groove for        the monitoring light from the hole or groove for the output        light; and    -   the output end face of the monitoring light-outputting optical        fiber piece is directed to the monitoring light-receiving means,        whereby the monitoring light outputted from the output end face        of the monitoring light-outputting optical fiber piece is        received by the monitoring light-receiving means.

A constitution of the above-mentioned example of the optical waveguidemodulator of the present invention equipped with an output light monitoris shown in FIG. 21.

In the modulator 131 of FIG. 21, a waveguide chip 132 has the sameconstitution as that shown in FIGS. 14 and 15. In an opticalfiber-supporting part 133, a V-shaped groove 113 for the main outputlight formed in an optical fiber-supporting base plate 134 and anoptical fiber 113 for the main output light are the same as those shownin FIGS. 14 and 15. However, a V-shaped groove 135 for the monitoringoutput light formed or the optical fiber-supporting base plate 134extends in an oblique angle at which the V-shaped groove for themonitoring light becomes more distant from the V-shaped groove 113 forthe main output light, and an optical fiber piece 136 for the monitoringoutput light in the V-shaped grooves 135. The monitoring output lightoptical fiber piece 136 extends across the optical fiber-supporting part133 and to the outside of the optical fiber-supporting base plate 134,and the end face of the optical fiber piece 136 faces a photoelectricconversion element 119 of the light receiving means 104. The monitoringlight 118 outputted from the end face of the monitoring light outputoptical fiber 136 is received by the photoelectric conversion element119 and is converted to an electric signal in this element. Thephotoelectric conversion element 119 is supported by a supporting member120. In this modulator, the monitoring light-outputting optical fiber ispreferably selected from multi-mode optical fibers, and an X coupler ora directional coupler is preferably arranged in the connecting portionof the surface waveguide. Alternatively, preferably, a main lightoutputting waveguide portion is connected to the connecting portion ofthe surface waveguide, and the monitoring light-outletting waveguideportion is connected to the main light-outpulling waveguide portionthrough a directional coupler. The length of the optical fiber piece 136for the monitoring light output must be not shorter than the length ofthe V-shaped group 135 for the monitoring light output. The length ofthe optical fiber piece 136 may be equal to the length of the V-shapedgroup 135 and is preferably longer than the V-shaped groove 135, asshown in FIG. 21.

In the above-mentioned example of the embodiment (2) of the opticalwaveguide modulator of the present invention equipped with an outputlight monitor, as the main light outputting waveguide portion of theoptical waveguide chip has a width of about 250 μm, and a portion of theoptical fiber for the main output light located outside of the opticalfiber-supporting base plate has an outside diameter of 250 to 400 μm,light radiation from an end face of the modulator chip can be directlyreceived by the photoelectric conversion element (PD) located in themodulator module, whereas in the conventional modulator, the directreceiving of the light radiation is difficult due to interferencebetween the main output light waveguide and the main output lightoptical fiber. Thus, in the above-mentioned example of the embodiment(2) of the present invention, a optical waveguide modulator equippedwith an output light monitor having little restriction in dimensions andform thereof, a high reliability, a low cost and a high utilizability inpractice, can be provided.

In another example of the embodiment (2) of the optical waveguidemodulator of the present invention equipped with an output lightmonitor, the monitoring light-outputting optical waveguide portion ofthe optical waveguide element is connected, together with the outputlight-outputting optical waveguide portion, to the waveguide-connectionportion connected to the plurality of surface waveguide portions,through a directional coupler, a cross-coupler structure or a TAPcoupler structure;

-   -   the output end of the output light-outputting optical waveguide        portion is connected to an input end of an optical fiber        inserted into the hole or groove of the reinforcing capillary;    -   the reinforcing capillary is formed from a light-transmitting        material, to thereby enable the monitoring light outputted from        the output end of the monitoring light outputting waveguide        portion to transmit and permeate through the reinforcing        capillary, to be reflected on the light-reflecting surface        portion provided in the reinforcing capillary, and to be        received by the monitoring light-receiving means; and    -   the output end of the output light-outputting optical waveguide        portion and the output end of the monitoring light-outputting        optical waveguide portion are spaced from each other by a        distance, the spacing distance being sufficiently large not to        cause the monitoring light outputted from the monitoring        light-outputting optical waveguide portion and transmitting        through the reinforcing capillary to be affected by the output        light outputted from the output end of the output        light-outputting optical waveguide portion.

The light-transmitting material for the reinforcing capillary ispreferably selected from silicon materials (for example, silicon singlecrystal), a transparent glass material (for example, quartz glasses orboro-silicate glasses) and a transparent ceramic material.

In the above-mentioned modulator, preferably, the terminal surface ofthe reinforcing capillary is provided with a light-reflecting surfaceportion which intersects an optical axis of the monitoringlight-outputting optical waveguide portion at an oblique angle, tothereby enable the monitoring light outputted from the output end of themonitoring light-outputting optical waveguide portion and transmittedthrough the reinforcing capillary to be reflected on the above-mentionedlight-reflecting surface portion toward the monitoring light-receivingmeans.

Also, in the modulator, the terminal surface of the reinforcingcapillary is optionally provided with a curved surface portionprojecting outward, to thereby enable the monitoring light transmittedthrough the reinforcing capillary to be reflected and converged on theabove-mentioned curved surface portion and to be received by themonitoring light-receiving means.

Further, in the modulation, at least a region of the portion of theterminal surface of the reinforcing capillary, which non-monitoringportion does not contribute to transmitting and outputting themonitoring light directed to the monitoring light-receiving means, isoptionally cut off.

Further, in the above-mentioned modulator, optionally, thelight-reflecting surface portion of the terminal surface of thereinforcing capillary intersects the longitudinal axis of the hole forcontaining therein the output light-outputting optical fiber at anoblique angle, to thereby enable the radiation mode light reflected onthe light reflecting surface portion to be received, as monitoringlight, by the monitoring light-receiving means.

The reinforcing capillary is preferably in the form a cylinder. In thiscase, the light-reflecting surface of the cylindrical reinforcingcapillary enables the radiation mode light reflected on thelight-reflecting surface to transmit through the cylindrical reinforcingcapillary and to be outputted, as monitoring light, through theperipheral surface of the cylindrical reinforcing capillary, while themonitoring light is converged by the lens effect of the periphery of thecylindrical reinforcing capillary, and the converged monitoring light tobe received by the monitoring light-receiving means.

As explained in referring to FIG. 11, preferably, in the terminalsurface of the reinforcing capillary, a boundary line between thelight-reflecting surface portion and the non-monitoring surface portionis located between a transmitting path of a portion of the radiationmode light forwarding to the light-reflecting surface portion andanother transmitting path of another portion of the radiation mode lightforwarding to the non-monitoring surface portion, and the boundary lineis positioned between a center line of the terminal surface of thereinforcing capillary intersecting the longitudinal axis of the hole andextending in the same direction as that of the boundary line, and atangential line extending in parallel to the center line and coming intocontact with a portion of a periphery line of the hole of thereinforcing capillary from which portion of the periphery line, thelight-reflecting surface portion is formed.

Also, optionally, the non-monitoring surface portion of the terminalsurface of the reinforcing capillary is one formed in a manner such thata portion of the reinforcing capillary is cut off inward from theterminal surface of the capillary, while another portion of thereinforcing capillary having the light-reflecting surface portion of theterminal surface thereof is not cut off.

Further, optionally, the non-monitoring surface portion of the terminalsurface of the reinforcing capillary is a non-light reflecting surfacenot capable of reflecting the radiation mode light and, with respect tothe non-monitoring surface portion of the terminal surface of thereinforcing capillary, a means for intercepting the radiation mode lightreflected on the non-monitoring surface portion is arranged between thenon-monitoring surface portion and the monitoring light-receiving means.

Referring to FIG. 22, the constitution of the above-mentioned embodimentof the optical waveguide modulator of the present invention equippedwith an output light-monitor will be explained below.

In FIG. 22, an optical waveguide having a plurality of surface opticalwaveguide portions 105 and 106 is formed on a dielectric substrate plate102, an input side end face of the waveguide is connected to an inputside optical fiber 91. The plurality (two in FIG. 22) of surfacewaveguide portions 105 and 106 are connected to each other at aconnecting portion 107, and an output end of the main output lightwaveguide portion 109 connected to the connecting portion 107 isconnected to an output side optical fiber 112. To reinforce theconnection of the output end of the main output light waveguide portion109 to the output side optical fiber 112, a reinforcing capillary 140 isconnected to the substrate plate 102 and the main output light waveguideportion 109. This reinforcing capillary 140 has a hole 112 a throughwhich the output side optical fiber 112 is inserted.

In an optical element, for example, an optical modulator having theMach-Zehnder type optical waveguide provided with the above-mentionedconstitution and capable of obtaining ON/OFF signals, the radiation modelight (monitoring light) 142 which is generated in an OFF modecondition, namely in a condition in which no optical signal isoutputted, is irradiated from around a connecting portion of the surfacewaveguides into the substrate plate at an oblique outward direction withrespect to the output light waveguide through which an optical signaloutput is waveguided. Usually, the radiation mode light (monitoringlight) 142 transmits through the substrate plate and is finallyirradiated from the end face of the base plate toward the outside of thebase plate. The light amount of the radiation mode light (monitoringlight) 142 is in a supplementary relationship to the light volume of theoptical signal output light transmitting through the output lightwaveguide, and therefore, the optical signal output can be monitored bydetecting the radiation mode light (monitoring light) 142.

The optical fiber 112 is connected to the end face of the substrateplate of the optical modulator to receive the optical signal output fromthe optical is waveguide and to guide the received light to the outsideof the modulator. The optical fiber has a very small thickness of 125μm, and thus when the optical fiber is simply bonded to the end face ofthe substrate plate, the resultant bonding strength is insufficient. Theconnection of the optical fiber 112 to the optical waveguide 109 can bereinforced and protected by covering the optical fiber 112 by using afiber-reinforcing capillary 140, and by bonding an end face of thereinforcing capillary 140 to the end face of the substrate plate 102, toenhance the bonding strength. Generally, the reinforcing capillary ismade from a silicon material or a ceramic material. In this case, whenthe reinforcing capillary is made from a material through which thesignal light/radiation mode light (monitoring light) can transmit, intodimensions in which the resultant capillary can receive the radiationmode light (monitoring light) irradiated from the end face of thesubstrate plate, the monitoring light 142 can be introduced into thereinforcing capillary.

When a terminal surface 141 of the reinforcing capillary (namely aterminal surface opposite to a connection end surface of the opticalfiber reinforcing member to which surface the output end face of theoptical waveguide element is bonded) is formed so as to intersect anoptical axis of the above-mentioned output light waveguide portion of109 at an oblique angle, as shown in FIG. 22, on the oblique terminalsurface 141, the monitoring light 142 transmitted through thereinforcing capillary 140 is reflected, and the reflected monitoringlight is delivered to the outside of the reinforcing capillary 140 (in adirection different from the direction in which the output light opticalfiber extends, namely, in any of the upward rightward downward orleftward directions). The delivered light is received by alight-receiving means, for example, a photodiode (PD) 104, arrangedseparately from the optical waveguide element, to measure the amount ofthe monitoring light, and the amount of the main output light outputtedfrom the optical waveguide can be monitored based on the measuredmonitoring light volume.

In the above-mentioned modulator system, however, the radiation modelight is inputted together with light come from the input side opticalfiber into the substrate plate and light scattered in the waveguide andcome to the substrate plate, into the light-receiving means, andtherefore, a problem such that an extinction ratio in the monitoringlight output is deteriorated, occurs.

The term “extinction ratio” is defined, when an ON/OFF signal isoutputted from an optical element, for example, an optical modulator, asa ratio of a highest monitoring output to a lowest monitoring output.

Referring to FIG. 22, at the connecting portion 107 of a plurality ofsurface waveguide portions 105 and 106 formed on the substrate plate102, a monitoring light-outputting waveguide portion 108 branched fromthe main light-outputting waveguide portion 119 is formed, and theoutput end faces of the waveguide portions 108 and 109 are connected tothe reinforcing capillary 140 having a size sufficient to receiving themonitoring light. The monitoring light outputted from the output endface of the monitoring light waveguide portion 18 transmits through thereinforcing capillary 140, and thus the monitoring light should beconducted to the light-receiving means 104. For example, as FIG. 22shows, the monitoring light 142 is reflected on the terminal reflectingsurface 141 of the reinforcing capillary 140, and then received by thelight-receiving means 104. The oblique intersecting angle between theterminal reflecting surface 141 and the optical axis of the monitoringlight waveguide portion 108 may be established so that the output light142 a of the reflected monitoring light can be received by the lightreceiving means 104. Also, optionally, the terminal reflecting surfaceis formed into a curved surface projecting outward as shown in FIG. 23,and the monitoring light 142 a reflected on the curved reflectingsurface 141 a is converged and received by the light receiving means104. Also, optionally the terminal reflecting surface is covered by ahigh reflectance membrane, for example, an Au or a Pt reflectancemembrane adhered thereto.

In the modulator of the present invention, the monitoring lighttransmitted through the reinforcing capillary 140 may pass through theterminal surface of the reinforcing capillary, without being reflecting,may be outputted and then may be received by the light receiving means.

In the modulator of the present invention as shown in FIGS. 22 and 23,the distance between the output end of the main light-outputtingwaveguide portion and the output end of the monitoring light-outputtingwaveguide portion is preferably established so that the monitoring light42 outputted from the monitoring light-outputting waveguide portion andtransmitting through the reinforcing capillary and the main output lightoutputted from the output end of the main light-outputting waveguideportion 109 are not affected by each other. More preferably, thedistance between the center axes of the light bundles of the monitoringlight and the main light is equal to or more than a radius of the outputside optical fiber 112, for example, when the optical fiber is a singlemode optical fiber, the distance is 62.5 μm or more.

In FIGS. 22 and 23, the monitoring light outputted from the output endof the monitoring light-outputting waveguide portion 108 passes throughthe reinforcing capillary 140, is reflected on the terminal surface 141or the terminal curved surface 141 a of the reinforcing capillary 140,and the reflected monitoring light 142 a is received by the lightreceiving means 104. In this case, the light bundle of the monitoringlight introduced into the reinforcing capillary 140 transmit throughonly a portion of the reinforcing capillary 140. The transmitting pathof the monitoring light is spaced from the transmitting path of the mainoutput light outputted from the output end of the main light-outputtingwaveguide portion 109, and the monitoring light and the main outletlight are not affected by each other.

At the connecting portion of a plurality of surface waveguide portionsof the modulator of the present invention, the connection of a mainlight-outputting waveguide portion to a monitoring light-outputtingwaveguide portion may be effected by the manners, for example, shown inFIG. 24(A) to FIG. 24(C). In FIG. 24(A), a monitoring light-outputtingwaveguide portion 106 is connected to a main light-outputting waveguideportion 109 through a TAP coupler structure 143. In this case, a portionof the main signal light is outputted as monitoring light into thereinforcing capillary 140 through a monitoring light-outputtingwaveguide portion 108. In FIG. 24(B), a directional coupler 144 isarranged in the connecting portion 107, and in FIG. 24(C), theconnecting portion 107 is formed into a cross-coupler structure 145. Inthe cases of FIGS. 24(B) and (C), radiation mode light generated in theconnecting portion 107 is outputted as monitoring light into thereinforcing capillary through the monitoring light-outputting waveguideportions.

In a modulator of the present invention as shown in FIG. 25, thereinforcing capillary 140 should be provided with a region, namely aneffective region 146, which enables the monitoring light 142 outputtedfrom the monitoring light-outputting waveguide portion 108 to transmitthrough the reinforcing capillary 140, to be outputted through theterminal surface 141 or 141 a thereof toward the light receiving means104, and to support an optical fiber thereby. The other region 147 whichdoes not contribute to transmitting and outputting of the monitoringlight may be cut-off as long as the optical fiber 112 can be supportedwithout hindrance.

For example, as shown in FIG. 26, the reinforcing capillary 140 has aconnection portion 140 a thereof connected to the optical waveguideelement and in the form of a cylinder, and the connection portion 140 ahas a hole 112 a for inserting an optical fiber (not shown in FIG. 26)therethrough. In FIG. 26, in a middle portion 140 b continued from theconnection portion 140 a, a left half portion with respect to the centeraxis of the hole 112 a is cut-off, so that a groove 148 continuing fromthe hole 112 a is formed in the middle portion 140 b. In the groove 148,the optical fiber (not shown in FIG. 26) is continued and supported. Ina terminal portion 140 c of the reinforcing capillary 140 continued fromthe middle portion 140 b and having a terminal reflecting surface 141formed on the terminal face thereof, an effective portion 146 thereof inwhich the transmitting path and the reflecting surface for themonitoring light is ensured remains and the other portion 147 iscut-off.

As FIGS. 25 and 26 show, by cutting-off the portion 147 of thereinforcing capillary which does not contribute to transmitting themonitoring light therethrough and to outputting the monitoring lighttherethrough, and to supporting the optical fiber therein, variousadvantages in that an undesired receipt of unnecessary light, forexample, leaked light due to incomplete connection between the opticalfiber and the optical waveguide and scattering light generated in theoptical waveguide can be prevented and the extinction ratio of themonitoring light can be increased, can be realized.

In the modulator as shown in FIGS. 27 and 28, an optical waveguide 131 aformed on a substrate plate 102 of an optical waveguide element 131comprises an input light waveguide portion 149, surface waveguideportion 105 and 106, a connecting portion 107, a main light-outputtingwaveguide portion 108 and a monitoring light-outputting waveguideportion 109, and a SiO₂ 150 is formed on the optical waveguide 131 a.However, no SiO₂ layer 150 is formed on the substrate surface portions102 a and 102 b on which the input light waveguide portion 149 and themain light and monitoring light-outputting waveguide portions 109 and108 are formed. Namely, the SiO₂ layer 150 is not formed on portionsclose to the input end and to the output end of the optical waveguide131 a. By forming the SiO₂ layer 150 in the manner as mentioned above,undesired inputting of light leaked from the SiO₂ layer into thereinforcing capillary can be prevented, and the extinction ratio of themonitoring light can be increased.

In the optical waveguide element, electrodes 151 are arranged on aplurality of surface waveguide portions 105 and 106 through the SiO₂layer. The intensity of the light waves transmitting through the surfacewaveguide portions 105 and 106 can be desirably modulated by controllingthe potential difference applied to the electrodes 151.

The optical waveguide element equipped with an output light monitor, ofthe above-mentioned embodiment of the present invention, enables themonitoring light generated in the connecting portion of the opticalwaveguide to be received by the light receiving means with a highefficiency at an extinction ratio similar to that of the main outputlight without affecting the main output light and the monitoring lighteach other.

INDUSTRIAL APPLICABILITY

The optical waveguide modulator equipped with an output light monitor ofthe present invention enables monitoring light to be transmitted to ameans for receiving and detecting the monitoring light to monitor theintensity of the outputted monitoring light in a simple constitutionthereof, and the intensity of the main output light to be controlled inresponse to the detecting results of the monitoring light.

1. An optical waveguide modulator comprising: an optical waveguideelement comprising a dielectric substrate and an optical waveguide on afront surface of the dielectric substrate, the optical waveguidecomprising a plurality of surface optical waveguide portions, an opticalwaveguide connecting portion on which the surface optical waveguideportions are converged and connected to each other, and an outputlight-outputting optical waveguide portion connected to the opticalwaveguide connecting portion; an optical fiber for output light,connected to an output end of the output light-outputting opticalwaveguide portion of the optical waveguide element; a transparentreinforcing capillary for reinforcing a connection between the opticalwaveguide element and the output light-outputting optical fiber; andmeans for receiving a monitoring light, wherein the transparentreinforcing capillary is provided with a hole formed therein forcontaining and holding the optical fiber for output light, a connectionsurface thereof connected to an output end side surface of thedielectric substrate, and a terminal reflecting surface thereof oppositeto the connection surface; the transparent reinforcing capillary isformed from a light-transmittable glass and configured to enableradiation mode light generated in the optical waveguide connectingportion to pass through the dielectric substrate to be received by thetransparent reinforcing capillary, and to be transmitted toward theterminal reflecting surface; the means for receiving a monitoring lightis located in a position in which the monitoring light outputted fromthe reinforcing capillary to outside of the capillary is received, andis provided with a photoelectric conversion element; the terminalreflecting surface is provided with a monitoring surface portionconfigured to reflect a first portion of the radiation mode light towardthe means for receiving a monitoring light, a non-monitoring surfaceportion configured to block a second portion of the radiation modelight, the second portion of the radiation mode light being differentfrom the first portion of the radiation mode light, from being receivedby the means for receiving a monitoring light; the terminal reflectingsurface intersects the direction of the longitudinal axis of the hole inwhich the output light-outputting optical fiber is received at anoblique angle to enable the radiation mode light reflected on theterminal reflecting surface to be received as monitoring light by themeans for receiving a monitoring light; and the transparent reinforcingcapillary is configured to enable the radiation mode light to bereceived on the connection surface thereof, to transmit from theconnecting surface to the terminal surface of the capillary through thetransparent capillary, to output a portion of the radiation mode lightto be reflected on the terminal surface as a monitoring light toward themeans for receiving a monitoring light, and to stably hold the opticalfiber connected to the output end of the optical waveguide.
 2. Theoptical waveguide modulator of claim 1, wherein the transparentreinforcing capillary is in the form of a cylinder configured toconverge the outputted monitoring light by lens effect of a periphery ofthe cylinder to be received by the means for receiving a monitoringlight.
 3. The optical waveguide modulator of claim 1, wherein alight-reflective membrane is formed on the terminal reflecting surfaceof the reinforcing capillary.
 4. The optical waveguide modulator ofclaim 1, wherein a portion of the terminal reflecting surface of thereinforcing capillary is formed into a curved surface projecting outwardto enable the monitoring light transmitted through the reinforcingcapillary to be reflected on the curved surface portion and converged,and to be received by the means for receiving a monitoring light.
 5. Theoptical waveguide modulator of claim 1 wherein, in the terminalreflecting surface of the reinforcing capillary, a boundary line betweenthe monitoring surface portion and the non-monitoring surface portion islocated between a transmitting path of a portion of the radiation modelight which reaches the monitoring surface portion and anothertransmitting path of another portion of the radiation mode light whichreaches the non-monitoring surface portion; and the boundary line ispositioned between a center line of the terminal reflecting surfaceintersecting the longitudinal axis of the hole and extending in the samedirection as the boundary line, and a tangential line extending inparallel to the center line and coming into contact with a portion of aperiphery line of the hole from which portion of the periphery line, thelight-reflecting surface portion is formed.
 6. The optical waveguidemodulator of claim 1, wherein the non-monitoring surface portion of theterminal reflecting surface of the reinforcing capillary is formed in amanner such that a portion of the reinforcing capillary is cut offinward from the terminal reflecting surface, while another portion ofthe reinforcing capillary which includes the monitoring surface portionis not cut off.
 7. The optical waveguide modulator of claim 1 furthercomprising means for intercepting the radiation mode light reflected onthe non-monitoring surface portion and arranged between thenon-monitoring surface portion and the means for receiving a monitoringlight.
 8. The optical waveguide modulator of claim 1 further comprisingmeans for intercepting the radiation mode light provided in thereinforcing capillary and upstream of the non-monitoring surfaceportion.
 9. The optical waveguide modulator of claim 1, wherein theconnection surface of the reinforcing capillary is bonded to the opticalwaveguide element through an adhesive agent, and a firststain-preventing groove is formed on a portion of a bottom surface ofthe reinforcing capillary and close to the connection surface of thereinforcing capillary to receive an excessive portion of the adhesiveagent applied between the connection surfaces and the optical waveguideelement and to present staining of the periphery of the reinforcingcapillary.
 10. The optical waveguide modulator of claim 1, wherein theoptical waveguide element has a SiO₂ layer formed on a portion of theoptical waveguide other than an input end portion of the surface opticalwaveguide portion and the output end portions of the outputlight-outputting optical waveguide portion and the monitoringlight-outputting optical waveguide portion.